Advances in X-Ray/EUV Sources, Optics, and Components is a technical conference focused on the development and application of X-ray and extreme ultraviolet (EUV) light sources, optical elements, and supporting components. It convenes researchers, engineers, and industry professionals at the San Diego Convention Center to present peer-reviewed research, share instrumentation advances, and discuss applications such as microscopy, spectroscopy, and EUV lithography. The event is notable for its specialized technical sessions and presentations that track advances in source technology, optics fabrication, and metrology for X-ray and EUV systems.
